Wafer transport SR-624HC
- Overview -
This is a robot with arm length 620mm.
- Specifications -
| Cleanliness | Class 100 | |
|---|---|---|
| Arm length | Axis 1 | 310 mm |
| Axis 2 | 310 mm | |
| Working envelope | Axis 1 | ±205 deg |
| Axis 2 | ±160 deg | |
| Axis 3 (Z-axis) | 100 mm | |
| Axis 4 (Z-rotation) | ±230 deg | |
| Maximum speed | Axis 1 | 274 deg/s |
| Axis 2 | 240 deg/s | |
| Axis 3 (Z-axis) | 200 mm/s | |
| Axis 4 (Z-rotation) | 240 deg/s | |
| Load | Maximum payload mass | 35 kg |
| Positioning repeatbility | X, Y | ±0.05 mm |
| Z-axis | ±0.05 mm | |
| Axis 4 (Z-axis rotation) | ±0.05 deg | |
| Drive system | AC Servo Motor | |
| Robot body | Mass | 220 kg |
| Color | Mistywhite | |
| Input Signal for Hand | 5 inputs, 2 outputs | |
| Position Detection Method | Absolute encoder mode | |
| Attached Cable | Standard: 5 m (max. 30m) | |
| Controller |
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