Micro-Pattern Imprinting Machine ST Series
ST50
Micro-pattern imprinting machine ST50 has the features of high-precision control of the press position and press force. It is a high-precision transcriber that can imprint fine-shaped various elements on the micrometer to nanometer order, which are important in the IT, electronics, biotechnology, life science, environment, and energy sectors.
Features
- The high resolution XY stage that supports step and repeat (S&R) imprinting can be equipped. (Option)
- The vacuum chamber that supports imprinting in vacuum can be equipped. (Option)
- The XYΘ stage and alignment camera for high-precision alignment of the mold and substrate can be equipped. (Option)
- The high-performance man-machine interface is equipped.
- UV imprinting or thermal imprinting is applicable.
Main Specifications
| Item | Value | |
|---|---|---|
| Mold size* | Up to φ150 mm (UV imprinting) | |
| Press axis | Press force setting range | 0 to 50 kN |
| Stroke setting range | 0 to 150 mm | |
| Speed setting range | 0.01 to 30 mm/s | |
| Temperature control* | Max.200℃ (Thermal imprinting) | |
| Dimensions L × W × H | 1.9 m × 1.0 m × 2.3 m | |
| Machine mass | 2800 kg | |
| Supported clean level cleanness class | ISO Class 6 (FED-STD209 Class 1000) | |
| Power supply | 220/200 V AC, 60/50 Hz | |
| Air source | 0.6 MPa, 300 NL/min | |
*Based on consultation
| Item | Contents |
|---|---|
| Alignment | High-precision alignment of the mold and substrate with the XYΘ stage and alignment camera |
| XY stage | S&R imprinting with the high-resolution XY stage |
| Vacuum chamber | Regular vacuum degree: 1000Pa, A stage can be built in |
| UV irradiation device | For UV imprinting |
| Loading device | Robot for carrying in materials and carrying out products |
*1) Consult us for specifications other than the above.
*2) Supplying clean air is needed when the vacuum chamber is equipped.